Ion-Assisted Electron-Beam (IAD E-Beam) Evaporative Deposition electron-bean assisted ionization involves bombarding and vaporizing source materials in a vacuum chamber with an electron gun. This ...
It is also equipped with a Hitachi Schottky Field Emission Gun, which enables probe currents of 200 nA ... the information depth were no longer visible. This is because the electron beam at 5 kV has a ...